Multi-chamber Deposition System
Photo by Lunghammer - TuGraz
One system, two deposition methods
The multi-chamber deposition system combines the possibility of depositing polymers by iCVD and inorganic thin films by PEALD. The samples can be transferred from one deposition chamber to the other without breaking the vacuum. Hybrid materials, hard-soft multilayers and more can be deposited with this system.
Funded by the ERC Starting Grant “SmartCore”!